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RESEARCH GROUP


DR. KIM, Seong-Keun

Smart Electronic Materials Lab

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번호 게재년월 구분 제목 파일
1 2010 국제 논문지 Role of Ru nano-dots embedded in TiO(2) thin films for improving the resistive switching behavior
2 2010 국제 논문지 Permittivity Enhanced Atomic Layer Deposited HfO(2) Thin Films Manipulated by a Rutile TiO(2) interlayer
3 2010 국제 논문지 Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition
4 2010 국제 논문지 Growth of RuO(2) Thin Films by Pulsed-Chemical Vapor Deposition Using RuO(4) Precursor and 5% H(2) Reduction Gas
5 2010 국제 논문지 Growth and Characterization of Conducting ZnO Thin Films by Atomic Layer Deposition
6 2010 국제 논문지 Capacitors with an Equivalent Oxide Thickness of < 0.5 nm for Nanoscale Electronic Semiconductor Memory
7 2010 국제 논문지 In situ synchrotron x-ray characterization of ZnO atomic layer deposition
8 2009 국제 논문지 Plasma-Enhanced Atomic Layer Deposition of TiO(2) and Al-Doped TiO(2) Films Using N(2)O and O(2) Reactants
9 2009 국제 논문지 Atomic Layer Deposition of TiO(2) Films on Ru Buffered TiN Electrode for Capacitor Applications
10 2009 국제 논문지 Liquid Injection Atomic Layer Deposition of Crystalline TiO(2) Thin Films with a Smooth Morphology from Ti(O-i-Pr)(2)(DPM)(2)
11 2009 국제 논문지 Growth of Noble Metal Ru Thin Films by Liquid Injection Atomic Layer Deposition
12 2008 국제 논문지 Novel post-process for the passivation of a CMOS biosenso
13 2008 국제 논문지 Growth behavior of Al-doped TiO2 thin films by atomic layer deposition
14 2008 국제 논문지 Controlling the composition of doped materials by ALD: A case study for Al-doped TiO(2) films
15 2008 국제 논문지 Atomic layer deposition of ZrO2 thin films with high dielectric constant on TiN substrates
16 2008 국제 논문지 Atomic layer deposition of hafnium oxide from tert-butoxytris(ethylmethylamido)hafnium and ozone: rapid growth, high density and thermal stability
17 2008 국제 논문지 Al-doped TiO2 films with ultralow leakage currents for next generation DRAM capacitors
18 2007 국제 논문지 Impact of O-3 feeding time on TiO2 films grown by atomic layer deposition for memory capacitor applications
19 2007 국제 논문지 Atomic layer deposition of Ru thin films using 2,4-(dimethylpentadienyl)(ethylcyclopentadienyl)Ru by a liquid injection system
20 2007 국제 논문지 Characteristics of a capacitive probe array for direct surface charge detection
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